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Local Structure of Zn Dopant in ß-Phase Ga2O3
Kyushu Univ, Japan.
Kyushu Univ, Japan.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0001-7192-0670
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-6661-2603
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2024 (English)In: The Journal of Physical Chemistry C, ISSN 1932-7447, E-ISSN 1932-7455, Vol. 128, no 44, p. 18879-18885Article in journal (Refereed) Published
Abstract [en]

Ga2O3 is a promising ultrawide-bandgap semiconductor for high-voltage and high-power applications, yet achieving reliable p-type electrical conductivity remains a significant challenge. We utilized halide vapor phase epitaxy growth to synthesize epitaxial layers of beta-phase Ga2O3 doped with Zn, which can serve as a suitable acceptor. Thin-film samples with Zn doping concentrations of 1.7 x 1019 and 2.5 x 1020 ions/cm3 were confirmed as single phases of monoclinic beta-Ga2O3 by X-ray diffraction. To determine the location of Zn ions within the beta-Ga2O3 lattice, we employed X-ray absorption near-edge structure (XANES) in conjunction with first-principles density functional theory calculations. Theoretical XANES spectra for Zn substitutions in the tetrahedral and octahedral Ga sites in beta-Ga2O3, as well as a precipitation of ZnGa2O4 spinel, were compared with the experimental data. The experimental XANES spectra of the Zn L 3 edge were reproduced well by theoretical spectra of Zn ions occupied at cationic positions at the tetrahedral coordinated site.

Place, publisher, year, edition, pages
AMER CHEMICAL SOC , 2024. Vol. 128, no 44, p. 18879-18885
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-209324DOI: 10.1021/acs.jpcc.4c05657ISI: 001344014600001Scopus ID: 2-s2.0-85207586029OAI: oai:DiVA.org:liu-209324DiVA, id: diva2:1912395
Note

Funding Agencies|Swedish Foundation for International Cooperation in Research and Higher Education [23IMS6006]; General Projects of the Research Institute for Information Technology, Kyushu University [MIRAI 2.0]; Swedish and Japanese Universities Collaboration Program; Swedish Foundation for International Cooperation in Research and Higher Education (STINT) [IB2022-9457]

Available from: 2024-11-12 Created: 2024-11-12 Last updated: 2025-10-07Bibliographically approved

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Hsiao, Ching-LienHsu, Chih-WeiOlovsson, WeineBirch, JensHemmingsson, CarlPozina, Galia

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Hsiao, Ching-LienHsu, Chih-WeiOlovsson, WeineBirch, JensHemmingsson, CarlPozina, Galia
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Thin Film PhysicsFaculty of Science & EngineeringSemiconductor MaterialsDepartment of Physics, Chemistry and BiologyNational Supercomputer Centre (NSC)
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The Journal of Physical Chemistry C
Inorganic Chemistry

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