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Study on performance improvement of zinc oxide gas sensor with silver nanoparticles surface modification
Natl Yang Ming Chiao Tung Univ, Taiwan.
Natl Taiwan Univ Sci & Technol, Taiwan.
Natl Chung Hsing Univ, Taiwan.
Taiwan Instrument Res Inst, Taiwan.
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2025 (English)In: Sensors and actuators. B, Chemical, ISSN 0925-4005, E-ISSN 1873-3077, Vol. 438, article id 137803Article in journal (Refereed) Published
Abstract [en]

This study used ZnO nano-rods grown on sapphire substrates by metalorganic chemical vapor deposition, focusing on the fabrication and performance improvement of gas sensor characteristics. Despite the potential of metal oxide semiconductor gas sensors, their commercialization remains limited due to challenges related to selectivity, operating temperature, and detection limits. The performance of these sensors is primarily influenced by surface area and the presence of oxygen vacancies. This investigation aimed to enhance these critical parameters through various techniques and to systematically analyze their impact on sensor performance. The ZnObased sensor demonstrated optimal performance at an operating temperature of 300 degrees C, exhibiting response levels of 97.82 % for 1 ppm concentrations of NO2 gas, respectively. By incorporating hydrothermally grown ZnO nanostructures and Ag nanoparticles via sputtering, the study achieved an increase in surface area and surface roughness, which effectively augmented gas adsorption sites. Effects of varying sputtering power for Ag nanoparticles on sensor performance were also examined. At a sputtering power of 25 W with an average Ag particle size of 3.2 nm, the sensor demonstrated a marked improvement in its response to NO2, achieving 434.3 % at 250 degrees C for a 1 ppm concentration, with a detection limit reaching as low as 1 ppb. Furthermore, the sensor displayed excellent repeatability and long-term stability, highlighting its suitability for real-time monitoring of low-concentration hazardous gases in environmental applications.

Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA , 2025. Vol. 438, article id 137803
Keywords [en]
Gas sensor; Nano-rods; NO2; ZnO; Surface morphology; Ag nanoparticles
National Category
Other Chemical Engineering
Identifiers
URN: urn:nbn:se:liu:diva-213542DOI: 10.1016/j.snb.2025.137803ISI: 001477113900001Scopus ID: 2-s2.0-105002845203OAI: oai:DiVA.org:liu-213542DiVA, id: diva2:1957903
Note

Funding Agencies|National Science and Technology Council (Taiwan, R.O.C.) [113-2923-E-A49-010-MY2, 112-2221-E-A49-069-MY3]; Swedish Government Strategic Research Area in Materials Science on Advanced Functional Materials at Linkoping University; Ministry of Education (Taiwan, R.O.C.) under 2024 MOE UI-UAAT Cooperation Project; [113-2218-E-A49-003-MBK]; [2009-00971]

Available from: 2025-05-13 Created: 2025-05-13 Last updated: 2025-05-13

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