We demonstrate the first fully vertical single-fin AlGaN FinFETs (Al = 2.5%) on ammonothermal n(+)-GaN substrates, featuring a gate length of L-g = 200 nm and excellent gate control. This work presents a systematic study of the impact of fin orientation along the a- and m-crystallographic planes on the electrical performance of AlGaN vertical FinFETs. We report that threshold voltage is maximized at fin width, W-fin = 100 nm, with V-T = 1.9 V (a-plane) and 1.75 V (m-plane). The highest ON-current density taken at an overdrive voltage V-OV = 1.5 V and peak extrinsic transconductance are achieved at W-fin = 200 nm, with J(ON) = 4.4 kA/cm(2) (a-plane) and 4.1 kA/cm(2) (m-plane), and g(me,peak) = 4.1 kS/cm(2) (a-plane) and 3.6 kS/cm(2) (m-plane). The minimum specific on-resistance of FinFETs with W-fin = 200 nm, extracted at V-OV = 1.5 V, is as follows: R-ON,R-sp = 0.85m Omega cm(2) (a-plane) and 0.97m Omega cm(2) (m-plane). The single-fin device area, including current spreading in the drift layer, is used for normalization. Among all variants, a-plane devices with narrower fins delivered the superior electrical performance. These results establish the critical role of crystallographic alignment in optimizing vertical AlGaN device performance and represent a significant step toward scalable vertical AlGaN power transistors.
Funding Agencies|Vetenskapsrdet [2022-04812]; Knut och Alice Wallenbergs Stiftelse [2024.0121]; VINNOVA [2022-03139]; Narodowe Centrum Badanacute; i Rozwoju [TECHMATSTRATEG-III/0003/2019]; Vinnova [2022-03139] Funding Source: Vinnova