Control of metal ion acceleration via gas rarefaction in synchronized HiPIMS for improved epitaxial AlN growthShow others and affiliations
2026 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 535, article id 133724Article in journal (Refereed) Published
Abstract [en]
Epitaxial growth of AlN on silicon is highly attractive for integrated nitride-based devices but remains challenging, as conventional techniques typically require high growth temperatures or suffer from limited industrial scalability. High-power impulse magnetron sputtering (HiPIMS) has emerged as a promising alternative by enabling enhanced ionization of the sputtered species and control of ion energy through substrate biasing. However, selective acceleration of the ionized film-forming species in HiPIMS is particularly challenging for AlN, due to the low atomic mass of Al relative to Ar. In this work, we successfully demonstrate that selective Al+ ion acceleration can be achieved by tuning the HiPIMS pulse length to exploit gas rarefaction, which suppresses Ar+ ion generation while sustaining a high Al+ ion density. Time-resolved mass spectrometry, supported by process modeling, reveals that increasing the pulse length induces a pronounced temporal separation between Ar+ and Al+ ion fluxes, resulting in a metal-ion-rich time window suitable for synchronized substrate biasing. Under these conditions, epitaxial AlN growth on Si(111) is achieved at a substantially reduced substrate temperature without the use of buffer or seed layers. The resulting films exhibit a clear enhancement in crystalline quality, strain state, and surface morphology consistent with a shift from Ar-ion-dominated to metal-ion-assisted growth. These findings establish pulse-length-controlled HiPIMS as an effective strategy for metal-ion-assisted epitaxial growth of AlN on silicon at moderate temperatures.
Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA , 2026. Vol. 535, article id 133724
Keywords [en]
HiPIMS; AlN; Epitaxial growth; Gas rarefaction; Ion flux dynamics; Bias synchronization
National Category
Materials Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-226669DOI: 10.1016/j.surfcoat.2026.133724ISI: 001822293800001Scopus ID: 2-s2.0-105043812291OAI: oai:DiVA.org:liu-226669DiVA, id: diva2:2093284
Note
Funding Agencies|CRYSTALLINE program at Silicon Austria Labs (SAL) [101126571, 2022-03071]; Horizon Europe's Excellent Science programme under the Marie Sklodowska-Curie COFUND Action [101126571]; ViNNOVA [2022-03071]; Swedish research council VR-RFI [2019-00191]; Vinnova [2022-03071] Funding Source: Vinnova
2026-08-182026-08-182026-08-18