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Control of metal ion acceleration via gas rarefaction in synchronized HiPIMS for improved epitaxial AlN growth
Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics. Linköping University, Faculty of Science & Engineering. Silicon Austria Labs GmbH, Austria.
Silicon Austria Labs GmbH, Austria.
Linköping University, Department of Physics, Chemistry and Biology, Nanostructured Materials. Linköping University, Faculty of Science & Engineering.
Masaryk Univ, Czech Republic.
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2026 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 535, article id 133724Article in journal (Refereed) Published
Abstract [en]

Epitaxial growth of AlN on silicon is highly attractive for integrated nitride-based devices but remains challenging, as conventional techniques typically require high growth temperatures or suffer from limited industrial scalability. High-power impulse magnetron sputtering (HiPIMS) has emerged as a promising alternative by enabling enhanced ionization of the sputtered species and control of ion energy through substrate biasing. However, selective acceleration of the ionized film-forming species in HiPIMS is particularly challenging for AlN, due to the low atomic mass of Al relative to Ar. In this work, we successfully demonstrate that selective Al+ ion acceleration can be achieved by tuning the HiPIMS pulse length to exploit gas rarefaction, which suppresses Ar+ ion generation while sustaining a high Al+ ion density. Time-resolved mass spectrometry, supported by process modeling, reveals that increasing the pulse length induces a pronounced temporal separation between Ar+ and Al+ ion fluxes, resulting in a metal-ion-rich time window suitable for synchronized substrate biasing. Under these conditions, epitaxial AlN growth on Si(111) is achieved at a substantially reduced substrate temperature without the use of buffer or seed layers. The resulting films exhibit a clear enhancement in crystalline quality, strain state, and surface morphology consistent with a shift from Ar-ion-dominated to metal-ion-assisted growth. These findings establish pulse-length-controlled HiPIMS as an effective strategy for metal-ion-assisted epitaxial growth of AlN on silicon at moderate temperatures.

Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA , 2026. Vol. 535, article id 133724
Keywords [en]
HiPIMS; AlN; Epitaxial growth; Gas rarefaction; Ion flux dynamics; Bias synchronization
National Category
Materials Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-226669DOI: 10.1016/j.surfcoat.2026.133724ISI: 001822293800001Scopus ID: 2-s2.0-105043812291OAI: oai:DiVA.org:liu-226669DiVA, id: diva2:2093284
Note

Funding Agencies|CRYSTALLINE program at Silicon Austria Labs (SAL) [101126571, 2022-03071]; Horizon Europe's Excellent Science programme under the Marie Sklodowska-Curie COFUND Action [101126571]; ViNNOVA [2022-03071]; Swedish research council VR-RFI [2019-00191]; Vinnova [2022-03071] Funding Source: Vinnova

Available from: 2026-08-18 Created: 2026-08-18 Last updated: 2026-08-18

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Behravan, NastaranFarhadizadeh, AlirezaBoyd, RobertOdén, MagnusLundin, Daniel
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