Low Temperature Photoluminescence Investigation of 3-Inch SiC Wafers for Power Device ApplicationsShow others and affiliations
2012 (English)In: HeteroSiC & WASMPE 2011, 2012, Vol. 711, p. 164-168Conference paper, Published paper (Refereed)
Resource type
Text
Abstract [en]
Focusing on the change in aluminium-related photoluminescence lines in 4H-SiC versus doping concentration, we have used a combination of LTPL (Low Temperature PhotoLuminescence) and secondary ion mass spectrometry measurements to set new calibration curves. In this way, one can probe the change in aluminum concentration in the range 1017 to 1019 cm-3. When applied to LTPL maps collected on full 3-inch wafers, we show that such abacuses constitute a powerful tool to control efficiently the doping level of as-grown p+ (emitters) and p++ (contact) layers for power device applications.
Place, publisher, year, edition, pages
2012. Vol. 711, p. 164-168
Series
Materials Science Forum, ISSN 0255-5476
Keywords [en]
Hot-Wall CVD, Low Temperature Photoluminescence, Al Doping, 4H-SiC
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering Condensed Matter Physics
Identifiers
URN: urn:nbn:se:liu:diva-128853DOI: 10.4028/www.scientific.net/MSF.711.164OAI: oai:DiVA.org:liu-128853DiVA, id: diva2:932662
Conference
HeteroSiC & WASMPE 2011
2016-06-022016-06-022021-12-29